A Review of Broadband Microfabricated Ultrasonic Systems for Biomedical Applications
Starting from an overview of historical aspects of biomedical ultrasound development and its application areas, as well as the brief description of state-of-the art microfabrication technologies, used for capacitive and piezoelectrical micromachined ultrasonic transducers manufacturing, also outlini...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Igor Sikorsky Kyiv Polytechnic Institute
2024-08-01
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| Series: | Mìkrosistemi, Elektronìka ta Akustika |
| Subjects: | |
| Online Access: | https://elc.kpi.ua/article/view/314787 |
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