Development and Optimization of a Differential Signal-Based Fabry-Perot Interferometer for Nanopositioning

In this study, we present the optimization of a Fabry-Perot interferometer with a differential signal utilized as the laser encoder to meet the stringent demands of nanopositioning. The proposed system aims to enhance stability and accuracy in nanopositioning applications by leveraging the common pa...

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Bibliographic Details
Main Authors: Syuan-Cheng Chang, Chung-Ping Chang, Yung-Cheng Wang
Format: Article
Language:English
Published: University North 2025-01-01
Series:Tehnički Glasnik
Subjects:
Online Access:https://hrcak.srce.hr/file/480458
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