Thermal oxidation CuO nanowire gas sensor for ozone detection applications
In this study, cupric oxide nanowires (CuO NWs) on patterned interdigitated electrodes (PIEs) used as ozone (O3) gas sensors, were successfully fabricated using thermal oxidation and the microelectromechanical systems (MEMS) technique. After the thermal oxidation process, CuO NWs with different heig...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-12-01
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| Series: | Sensors and Actuators Reports |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666053924000444 |
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