A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO<sub>3</sub> with Arc-Shaped Electrodes
High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO<sub>3</sub> thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric co...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/11/1367 |
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