Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation
Abstract The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements. Here we report on a technological platform where several mechanical resonators can be...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-11-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00816-z |
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