KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING
Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in...
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| Format: | Article |
| Language: | English |
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Belarusian National Technical University
2015-03-01
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| Series: | Приборы и методы измерений |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/79 |
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| author | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky |
| author_facet | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky |
| author_sort | R. I. Vorobey |
| collection | DOAJ |
| description | Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in the form of parameter distribution color map. A method of measurements based on Kelvin probe self-calibration mode is realized in a measurement installation for non-destructive non-contact monitoring of semiconductor wafer defects. Method can be used to define defects’ physical properties including minority carrier diffusion length and lifetime, trapped charge density and energy distribution etc. |
| format | Article |
| id | doaj-art-38a20cde371b4a58bbf54567f9b67bb8 |
| institution | Kabale University |
| issn | 2220-9506 2414-0473 |
| language | English |
| publishDate | 2015-03-01 |
| publisher | Belarusian National Technical University |
| record_format | Article |
| series | Приборы и методы измерений |
| spelling | doaj-art-38a20cde371b4a58bbf54567f9b67bb82025-08-20T04:00:07ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732015-03-0102465271KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORINGR. I. Vorobey0O. K. Gusev1A. L. Zharin2A. N. Petlitsky3V. A. Pilipenko4A. S. Turtsevitch5A. K. Tyavlovsky6Belarusian National Technical UniversityBelarusian National Technical UniversityBelarusian National Technical University"INTEGRAL" – Holding Management Company, Minsk"INTEGRAL" – Holding Management Company, Minsk"INTEGRAL" – Holding Management Company, MinskBelarusian National Technical UniversityImprovement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in the form of parameter distribution color map. A method of measurements based on Kelvin probe self-calibration mode is realized in a measurement installation for non-destructive non-contact monitoring of semiconductor wafer defects. Method can be used to define defects’ physical properties including minority carrier diffusion length and lifetime, trapped charge density and energy distribution etc.https://pimi.bntu.by/jour/article/view/79nondestructive monitoringkelvin probesemiconductor wafersurface defectssurface potential visualization |
| spellingShingle | R. I. Vorobey O. K. Gusev A. L. Zharin A. N. Petlitsky V. A. Pilipenko A. S. Turtsevitch A. K. Tyavlovsky KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING Приборы и методы измерений nondestructive monitoring kelvin probe semiconductor wafer surface defects surface potential visualization |
| title | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_full | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_fullStr | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_full_unstemmed | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_short | KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING |
| title_sort | kelvin probe self calibration mode for semiconductor wafers properties monitoring |
| topic | nondestructive monitoring kelvin probe semiconductor wafer surface defects surface potential visualization |
| url | https://pimi.bntu.by/jour/article/view/79 |
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