KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING

KELVIN PROBE SELF-CALIBRATION MODE FOR SEMICONDUCTOR WAFERS PROPERTIES MONITORING

Improvement of repeatability and reliability of semiconductor wafers properties monitoring with a probe charge-sensitive methods is achieved by realization of Kelvin probe self-calibration mode using a wafer’s surface itself as a reference sample. Results of wafer surface scanning are visualized in...

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Bibliographic Details
Main Authors: R. I. Vorobey, O. K. Gusev, A. L. Zharin, A. N. Petlitsky, V. A. Pilipenko, A. S. Turtsevitch, A. K. Tyavlovsky
Format: Article
Language:English
Published: Belarusian National Technical University 2015-03-01
Series:Приборы и методы измерений
Subjects:
nondestructive monitoring
kelvin probe
semiconductor wafer
surface defects
surface potential visualization
Online Access:https://pimi.bntu.by/jour/article/view/79
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https://pimi.bntu.by/jour/article/view/79

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