Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications

Fabrication and Electrical Characterization of Low-Temperature Polysilicon Films for Sensor Applications

The development of low-temperature piezoresistive materials provides compatibility with standard silicon-based MEMS fabrication processes. Additionally, it enables the use of such material in flexible substrates, thereby expanding the potential for various device applications. This work demonstrates...

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Bibliographic Details
Main Authors: Filipa C. Mota, Inês S. Garcia, Aritz Retolaza, Dimitri E. Santos, Patrícia C. Sousa, Diogo E. Aguiam, Rosana A. Dias, Carlos Calaza, Alexandre F. Silva, Filipe S. Alves
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Micromachines
Subjects:
metal-induced crystallization
polysilicon
low-temperature
gauge factor
temperature coefficient of resistance
polyimide
Online Access:https://www.mdpi.com/2072-666X/16/1/57
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