Hysteresis Compensation and Butterworth Pattern-Based Positive Acceleration Velocity Position Feedback Damping Control of a Tip-Tilt-Piston Piezoelectric Stage

Hysteresis Compensation and Butterworth Pattern-Based Positive Acceleration Velocity Position Feedback Damping Control of a Tip-Tilt-Piston Piezoelectric Stage

In order to solve the hysteresis nonlinearity and resonance problems of piezoelectric stages, this paper takes a three-degree-of-freedom tip-tilt-piston piezoelectric stage as the object, compensates for the hysteresis nonlinearity through inverse hysteresis model feedforward control, and then combi...

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Bibliographic Details
Main Authors: Helei Zhu, Jinfu Sima, Peixing Li, Leijie Lai, Zhenfeng Zhou
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Actuators
Subjects:
piezoelectric actuators
hysteresis models
damping control
resonance suppression
tracking control
Online Access:https://www.mdpi.com/2076-0825/13/12/468
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