Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field

Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field

The helicon plasma exhibits the advantages of a high rate of ionization, high density and low confinement magnetic field. It has been widely used in plasma thruster, semiconductor etching, etc. The density of helicon plasmas would be monotonically dependent on the external magnetic field when the ma...

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Bibliographic Details
Main Author:	DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
Format:	Article
Language:	English
Published:	Editorial Board of Atomic Energy Science and Technology 2024-12-01
Series:	Yuanzineng kexue jishu
Subjects:	helicon plasma low-field peak standing wave power deposition
Online Access:	https://yznkxjs.xml-journal.net/article/doi/10.7538/yzk.2024.youxian.0026
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