Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
The helicon plasma exhibits the advantages of a high rate of ionization, high density and low confinement magnetic field. It has been widely used in plasma thruster, semiconductor etching, etc. The density of helicon plasmas would be monotonically dependent on the external magnetic field when the ma...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Editorial Board of Atomic Energy Science and Technology
2024-12-01
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| Series: | Yuanzineng kexue jishu |
| Subjects: | |
| Online Access: | https://yznkxjs.xml-journal.net/article/doi/10.7538/yzk.2024.youxian.0026 |
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