Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair
The slip mechanism between the chunk and wafer during high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear. Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Lubricants |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-4442/13/4/147 |
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