Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair

Atomic Simulation of Wear and Slip Behavior Between Monocrystalline Silicon and 6H-SiC Friction Pair

The slip mechanism between the chunk and wafer during high-speed dynamic scanning of the extreme ultraviolet lithography (EUV) motion stage remains unclear. Considering real-machined roughness, molecular dynamics (MD) simulations were performed to investigate the nanotribological behavior of 6H-SiC...

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Bibliographic Details
Main Authors: Jiansheng Pan, Jianwei Wu, Daiyi Lei, Huan Liu, Pengyue Zhao, Bo Zhao, Jiang Liu, Qingshan Yang
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Lubricants
Subjects:
microslip
molecular dynamics
sinusoidal asperity
normal load
Online Access:https://www.mdpi.com/2075-4442/13/4/147
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