Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma

Method for Removing Impurities by Treating Silicon Tetrachloride with Hydrogen Plasma

The transformation of organochlorine and organic impurities such as CCl<sub>4</sub>, C<sub>2</sub>H<sub>2</sub>Cl<sub>2</sub>, C<sub>2</sub>HCl<sub>3</sub>, C<sub>2</sub>Cl<sub>4</sub>, C<sub>2</...

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Bibliographic Details
Main Authors: Roman Kornev, Georgy Mochalov, Nikita Maleev, Sergei Romanov, Konstantin Kornev, Alexandra Kalinina
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Inorganics
Subjects:
gas discharge
hydrogen reduction
silicon chloride
trichlorosilane
silane
organochlorine impurities
Online Access:https://www.mdpi.com/2304-6740/13/3/80
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