Enhanced attractive force via torsion spring as rotatable tip structure in beam-structure electrostatic chucks
This research aims to replace ball joints of beam-structure electrostatic chucks (BSESC), which are limited by issues such as structural friction and inconsistent operation, thus enhancing the applicability in industrial settings. Torsion springs are used as rotational degree-of-freedom (RDOF) mecha...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-12-01
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| Series: | Results in Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590123024016189 |
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