A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

A Novel Optical Proximity Correction Machine Learning Model Using a Single-Flow Convolutional Feedback Networks With Customized Attention

In semiconductor fabrication, any deviation leads to significant mistakes in the result. Thus, the proximity effect is a critical issue that must be solved. In the past, optical proximity correction was constructed by fabrication experience and physics formula models, resulting in difficulties when...

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Bibliographic Details
Main Authors: Ching-Hsuan Huang, Han-Chun Tung, Yen-Wei Feng, Hung-Tse Hsu, Hsueh-Li Liu, Albert Lin, Peichen Yu
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Access
Subjects:
Attention mechanism
optical proximity correction
U-Net
Online Access:https://ieeexplore.ieee.org/document/10750352/
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https://ieeexplore.ieee.org/document/10750352/

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