Recent Advances in Atomic Force Microscopy‐Based Local Anodic Oxidation Nanolithography of 2D Materials

Abstract 2D materials garner significant research interest due to their unique properties. However, fabricating 2D material electronic devices requires arraying these materials, which often leads to issues like residual photoresist and the need for expensive equipment such as E‐beam and optical lith...

Full description

Saved in:
Bibliographic Details
Main Authors: Jing Yu, Abdulsalam Aji Suleiman, Jing‐Wen Shi, Ruey Jinq Ong, Francis Chi‐Chung Ling, Weiwen Zhang
Format: Article
Language:English
Published: Wiley-VCH 2025-08-01
Series:Advanced Materials Interfaces
Subjects:
Online Access:https://doi.org/10.1002/admi.202500137
Tags: Add Tag
No Tags, Be the first to tag this record!