Influence of Ion Implantation on the Structural and Stressed State and Mechanical Properties of Nitrides of High-entropy (TiZrAlYNb)N and (TiZrHfVNbTa)N Alloys
As a result of deposition of nanostructured multicomponent (TiZrAlYNb)N and (TiZrHfVNbTa)N nit-ride coatings, a phase with FCC lattice and crystallite sizes from 7 nm to 17-20 nm, respectively, is formed. Compressive stresses are developed, with values of – 2.97 GPa and – 3.86 GPa for 6-elements nit...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2015-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2015/3/articles/jnep_2015_V7_03044.pdf |
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| Summary: | As a result of deposition of nanostructured multicomponent (TiZrAlYNb)N and (TiZrHfVNbTa)N nit-ride coatings, a phase with FCC lattice and crystallite sizes from 7 nm to 17-20 nm, respectively, is formed. Compressive stresses are developed, with values of – 2.97 GPa and – 3.86 GPa for 6-elements nitrides, and – 0.25 GPa and – 3.14 GPa for 5-elements coatings. Dependence of the stress change on the nitride concentration in the coatings is found, and possible reasons of the observed correlation are discussed. Ion implantation of Au-leads to disorder of the coatings structure in the implanted layer, decrease of nanocrystallite sizes, and, as a result, increase of nanohardness of the coatings to 39 GPa. |
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| ISSN: | 2077-6772 |