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    Structural and Optical Properties of Amorphous Al2O3 Thin Film Deposited by Atomic Layer Deposition by Shuzheng Shi, Shuo Qian, Xiaojuan Hou, Jiliang Mu, Jian He, Xiujian Chou

    Published 2018-01-01
    “…The surface topography investigated by atomic force microscopy (AFM) showed that the samples were smooth and crack-free. …”
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