Understanding the Nanoindentation Edge Effect of Single-Crystal Silicon Using Molecular Dynamics Simulations by Chao Long, Ruihan Li, Pengyue Zhao, Ziteng Li, Shuhao Kang, Duo Li, Huan Liu

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Surface quality prediction and validation of Electro-Fenton chemical mechanical polishing for single crystal SiC based on neural network models by Jiacheng Geng, Jiayun Deng, Zilei Bai, Xiaoning Wen, Jiabin Lu, Qiusheng Yan, Xiaojing Yang

Subjects: “…Single-crystal SiC…”
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