Optimization of Soft X-Ray Fresnel Zone Plate Fabrication Through Joint Electron Beam Lithography and Cryo-Etching Techniques by Maha Labani, Vito Clericò, Enrique Diez, Giancarlo Gatti, Mario Amado, Ana Pérez-Rodríguez

Subjects: “…electron beam lithography…”
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Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review by Svetlana N. Khonina, Nikolay L. Kazanskiy, Muhammad A. Butt

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Dry etch performance of Novolak-based negative e-beam resist by Rahul Singh, Christian Vinther Bertelsen, Maria Dimaki, Winnie Edith Svendsen

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Direct electron beam patterning of electro-optically active PEDOT:PSS by Doshi Siddharth, Ludescher Dominik, Karst Julian, Floess Moritz, Carlström Johan, Li Bohan, Mintz Hemed Nofar, Duh Yi-Shiou, Melosh Nicholas A., Hentschel Mario, Brongersma Mark, Giessen Harald

Subjects: “…direct electron beam lithography…”
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PlQC based highly sensitive and reproducible novel SERS active substrate for biomolecule detection with high specificity by Sibashish Chakraborty, Rishabh Vij, Richa Goel, Bhanu Pratap Singh, Kunaal Dhingra, Venu Gopal Achanta, Satish Kumar Dubey

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