Glycerol-assisted grain modulation in femtosecond-laser-induced photochemical synthesis of patterned ZnO nanomaterials

ZnO nanomaterials have become appealing for next-generation micro/nanodevices owing to their remarkable functionality and outstanding performance. However, in-situ, one-step, patterned synthesis of ZnO nanomaterials with small grain sizes and high specific surface areas remains challenging. While br...

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Bibliographic Details
Main Authors: Yingchen Wang, Songyan Xue, Yinuo Xu, Jing Long, Binzhang Jiao, Hui Gao, Xuhao Fan, Yuncheng Liu, Leimin Deng, Wei Xiong
Format: Article
Language:English
Published: Light Publishing Group 2025-04-01
Series:Light: Advanced Manufacturing
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Online Access:https://www.light-am.com/article/doi/10.37188/lam.2025.007
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Summary:ZnO nanomaterials have become appealing for next-generation micro/nanodevices owing to their remarkable functionality and outstanding performance. However, in-situ, one-step, patterned synthesis of ZnO nanomaterials with small grain sizes and high specific surface areas remains challenging. While breakthroughs in laser-based synthesis techniques have enabled simultaneous growth and patterning of these materials, device integration restrictions owing to pre-prepared laser-absorbing layers remain a severe issue. Herein, we report a single-step femtosecond laser direct writing (FsLDW) method for fabricating ZnO nanomaterial micropatterns with a minimum linewidth of less than 1 μm without requiring laser-absorbing layers. Furthermore, utilizing the grain-size modulation effect of glycerol, we successfully reduced the grain size and addressed the challenges of discontinuity and non-uniform product formation during FsLDW. Using this technique, we successfully fabricated a series of micro-photodetectors with exceptional performance, a switching ratio of 105, and a responsivity of 102 A/W. Notably, the devices exhibited an ultralow dark current of less than 10 pA, more than one order of magnitude lower than the dark current of ZnO photodetectors under the same bias voltage—crucial for enhancing the signal-to-noise ratio and reducing the power consumption of photodetectors. The proposed method could be extended to preparing other metal-oxide nanomaterials and devices, thus providing new opportunities for developing customized, miniaturized, and integrated functional devices.
ISSN:2689-9620