A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, E.A. Pilyuk, & M.B. Dobromyslov. Features of Structure of Magnetron Films Si3N4 and SiC. Sumy State University.
Chicago Style (17th ed.) CitationA.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, E.A. Pilyuk, and M.B. Dobromyslov. Features of Structure of Magnetron Films Si3N4 and SiC. Sumy State University.
MLA (9th ed.) CitationA.P. Kuzmenko, et al. Features of Structure of Magnetron Films Si3N4 and SiC. Sumy State University.
Warning: These citations may not always be 100% accurate.