Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films

Two series of non-hydrogenated diamond-like carbon (DLC) films and molybdenum doped diamond-like carbon (Mo-DLC) films were grown on the silicon substrate using direct current magnetron sputtering. The influence of molybdenum doping (between 6.3 and 11.9 at.% of Mo), as well as the deposited tempera...

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Main Authors: Hassan Zhairabany, Hesam Khaksar, Edgars Vanags, Liutauras Marcinauskas
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/14/11/962
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author Hassan Zhairabany
Hesam Khaksar
Edgars Vanags
Liutauras Marcinauskas
author_facet Hassan Zhairabany
Hesam Khaksar
Edgars Vanags
Liutauras Marcinauskas
author_sort Hassan Zhairabany
collection DOAJ
description Two series of non-hydrogenated diamond-like carbon (DLC) films and molybdenum doped diamond-like carbon (Mo-DLC) films were grown on the silicon substrate using direct current magnetron sputtering. The influence of molybdenum doping (between 6.3 and 11.9 at.% of Mo), as well as the deposited temperature (between 185 and 235 °C) on the surface morphology, elemental composition, bonding microstructure, friction force, and nanohardness of the films, were characterized by atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDX), Raman spectroscopy, and a nanoindenter. It was found that the increase in the metal dopant concentration led to a higher metallicity and graphitization of the DLC films. The surface roughness and sp<sup>3</sup>/sp<sup>2</sup> ratio were obtained as a function of the Mo concentration and formation temperature. The nanohardness of DLC films was improved by up to 75% with the addition of Mo. Meanwhile, the reduction in the deposition temperature decreased the nanohardness of the DLC films. The friction coefficient of the DLC films was slightly reduced with addition of the molybdenum.
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series Crystals
spelling doaj-art-ed9c01507d244eb8a6a4e2bc7269e31f2024-11-26T17:58:39ZengMDPI AGCrystals2073-43522024-11-01141196210.3390/cryst14110962Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon FilmsHassan Zhairabany0Hesam Khaksar1Edgars Vanags2Liutauras Marcinauskas3Department of Physics, Kaunas University of Technology, Studentų Str. 50, 51368 Kaunas, LithuaniaMarian Smoluchowski Institute of Physics, Jagiellonian University, ul. Lojasiewicza 11, 30-348 Krakow, PolandInstitute of Solid State Physics, University of Latvia, Kengaraga Str. 8, LV1063 Riga, LatviaDepartment of Physics, Kaunas University of Technology, Studentų Str. 50, 51368 Kaunas, LithuaniaTwo series of non-hydrogenated diamond-like carbon (DLC) films and molybdenum doped diamond-like carbon (Mo-DLC) films were grown on the silicon substrate using direct current magnetron sputtering. The influence of molybdenum doping (between 6.3 and 11.9 at.% of Mo), as well as the deposited temperature (between 185 and 235 °C) on the surface morphology, elemental composition, bonding microstructure, friction force, and nanohardness of the films, were characterized by atomic force microscopy (AFM), energy dispersive X-ray spectroscopy (EDX), Raman spectroscopy, and a nanoindenter. It was found that the increase in the metal dopant concentration led to a higher metallicity and graphitization of the DLC films. The surface roughness and sp<sup>3</sup>/sp<sup>2</sup> ratio were obtained as a function of the Mo concentration and formation temperature. The nanohardness of DLC films was improved by up to 75% with the addition of Mo. Meanwhile, the reduction in the deposition temperature decreased the nanohardness of the DLC films. The friction coefficient of the DLC films was slightly reduced with addition of the molybdenum.https://www.mdpi.com/2073-4352/14/11/962Mo-doped diamond-like carbonmicrostructurefriction coefficientnano-hardnessdeposition temperature
spellingShingle Hassan Zhairabany
Hesam Khaksar
Edgars Vanags
Liutauras Marcinauskas
Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
Crystals
Mo-doped diamond-like carbon
microstructure
friction coefficient
nano-hardness
deposition temperature
title Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
title_full Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
title_fullStr Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
title_full_unstemmed Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
title_short Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films
title_sort effect of molybdenum concentration and deposition temperature on the structure and tribological properties of the diamond like carbon films
topic Mo-doped diamond-like carbon
microstructure
friction coefficient
nano-hardness
deposition temperature
url https://www.mdpi.com/2073-4352/14/11/962
work_keys_str_mv AT hassanzhairabany effectofmolybdenumconcentrationanddepositiontemperatureonthestructureandtribologicalpropertiesofthediamondlikecarbonfilms
AT hesamkhaksar effectofmolybdenumconcentrationanddepositiontemperatureonthestructureandtribologicalpropertiesofthediamondlikecarbonfilms
AT edgarsvanags effectofmolybdenumconcentrationanddepositiontemperatureonthestructureandtribologicalpropertiesofthediamondlikecarbonfilms
AT liutaurasmarcinauskas effectofmolybdenumconcentrationanddepositiontemperatureonthestructureandtribologicalpropertiesofthediamondlikecarbonfilms