Second harmonic generation in monolithic gallium phosphide metasurfaces
Gallium phosphide (GaP) offers unique opportunities for nonlinear and quantum nanophotonics due to its wide optical transparency range, high second-order nonlinear susceptibility, and the possibility to tailor the nonlinear response by a suitable choice of crystal orientation. However, the availabil...
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| Format: | Article |
| Language: | English |
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De Gruyter
2024-07-01
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| Series: | Nanophotonics |
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| Online Access: | https://doi.org/10.1515/nanoph-2024-0177 |
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| author | Yang Muyi Weissflog Maximilian A. Fedorova Zlata Barreda Angela I. Börner Stefan Eilenberger Falk Pertsch Thomas Staude Isabelle |
| author_facet | Yang Muyi Weissflog Maximilian A. Fedorova Zlata Barreda Angela I. Börner Stefan Eilenberger Falk Pertsch Thomas Staude Isabelle |
| author_sort | Yang Muyi |
| collection | DOAJ |
| description | Gallium phosphide (GaP) offers unique opportunities for nonlinear and quantum nanophotonics due to its wide optical transparency range, high second-order nonlinear susceptibility, and the possibility to tailor the nonlinear response by a suitable choice of crystal orientation. However, the availability of single crystalline thin films of GaP on low index substrates, as typically required for nonlinear dielectric metasurfaces, is limited. Here we designed and experimentally realized monolithic GaP metasurfaces for enhanced and tailored second harmonic generation (SHG). We fabricated the metasurfaces from bulk (110) GaP wafers using electron-beam lithography and an optimized inductively coupled plasma etching process without a hard mask. SHG measurements showed a high NIR-to-visible conversion efficiency reaching up to 10−5, at the same level as typical values for thin-film-based metasurface designs based on III–V semiconductors. Furthermore, using nonlinear back-focal plane imaging, we showed that a significant fraction of the second harmonic was emitted into the zeroth diffraction order along the optical axis. Our results demonstrate that monolithic GaP metasurfaces are a simple and broadly accessible alternative to corresponding thin film designs for many applications in nonlinear nanophotonics. |
| format | Article |
| id | doaj-art-ecf9e90d6f524e24a68fd89c8a0d4a52 |
| institution | Kabale University |
| issn | 2192-8614 |
| language | English |
| publishDate | 2024-07-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Nanophotonics |
| spelling | doaj-art-ecf9e90d6f524e24a68fd89c8a0d4a522024-11-25T11:19:12ZengDe GruyterNanophotonics2192-86142024-07-0113183311331910.1515/nanoph-2024-0177Second harmonic generation in monolithic gallium phosphide metasurfacesYang Muyi0Weissflog Maximilian A.1Fedorova Zlata2Barreda Angela I.3Börner Stefan4Eilenberger Falk5Pertsch Thomas6Staude Isabelle7Institute of Solid State Physics, 539151Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, 539151Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745Jena, GermanyInstitute of Solid State Physics, 539151Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743Jena, GermanyInstitute of Solid State Physics, 539151Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, 539151Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, 539151Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745Jena, GermanyInstitute of Applied Physics, Abbe Center of Photonics, 539151Friedrich Schiller University Jena, Albert-Einstein-Str. 15, 07745Jena, GermanyInstitute of Solid State Physics, 539151Friedrich Schiller University Jena, Max-Wien-Platz 1, 07743Jena, GermanyGallium phosphide (GaP) offers unique opportunities for nonlinear and quantum nanophotonics due to its wide optical transparency range, high second-order nonlinear susceptibility, and the possibility to tailor the nonlinear response by a suitable choice of crystal orientation. However, the availability of single crystalline thin films of GaP on low index substrates, as typically required for nonlinear dielectric metasurfaces, is limited. Here we designed and experimentally realized monolithic GaP metasurfaces for enhanced and tailored second harmonic generation (SHG). We fabricated the metasurfaces from bulk (110) GaP wafers using electron-beam lithography and an optimized inductively coupled plasma etching process without a hard mask. SHG measurements showed a high NIR-to-visible conversion efficiency reaching up to 10−5, at the same level as typical values for thin-film-based metasurface designs based on III–V semiconductors. Furthermore, using nonlinear back-focal plane imaging, we showed that a significant fraction of the second harmonic was emitted into the zeroth diffraction order along the optical axis. Our results demonstrate that monolithic GaP metasurfaces are a simple and broadly accessible alternative to corresponding thin film designs for many applications in nonlinear nanophotonics.https://doi.org/10.1515/nanoph-2024-0177gallium phosphidenonlinear metasurfacessecond harmonic generationnanofabrication |
| spellingShingle | Yang Muyi Weissflog Maximilian A. Fedorova Zlata Barreda Angela I. Börner Stefan Eilenberger Falk Pertsch Thomas Staude Isabelle Second harmonic generation in monolithic gallium phosphide metasurfaces Nanophotonics gallium phosphide nonlinear metasurfaces second harmonic generation nanofabrication |
| title | Second harmonic generation in monolithic gallium phosphide metasurfaces |
| title_full | Second harmonic generation in monolithic gallium phosphide metasurfaces |
| title_fullStr | Second harmonic generation in monolithic gallium phosphide metasurfaces |
| title_full_unstemmed | Second harmonic generation in monolithic gallium phosphide metasurfaces |
| title_short | Second harmonic generation in monolithic gallium phosphide metasurfaces |
| title_sort | second harmonic generation in monolithic gallium phosphide metasurfaces |
| topic | gallium phosphide nonlinear metasurfaces second harmonic generation nanofabrication |
| url | https://doi.org/10.1515/nanoph-2024-0177 |
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