Method for Extracting Optical Element Information Using Optical Coherence Tomography

Method for Extracting Optical Element Information Using Optical Coherence Tomography

This study examines the measurement of film thickness, curvature, and defects on the surface or inside of an optical element using a highly accurate and efficient method. This is essential to ensure their quality and performance. Existing methods are unable to simultaneously extract the three types...

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Bibliographic Details
Main Authors: Jiucheng Nie, Yukun Wang, Dacheng Wang, Yue Ding, Chengchen Zhou, Jincheng Wang, Shuangshuang Zhang, Junwei Song, Mengxue Cai, Junlin Wang, Zhongxu Cui, Yuhan Hou, Si Chen, Linbo Liu, Xiaokun Wang
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Sensors
Subjects:
spectral-domain OCT
thickness measurement
curvature measurement
multilayer film
Online Access:https://www.mdpi.com/1424-8220/24/21/6953
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