Athermal Tantalum Pentoxide Mach-Zehnder Interferometers Based on Structural Compensation Method

Athermal Tantalum Pentoxide Mach-Zehnder Interferometers Based on Structural Compensation Method

We demonstrate Mach-Zehnder interferometer-based (MZI) athermal photonic devices using the structural compensation method. Unlike previous structural compensation studies that were applied on the thermal sensitive materials such as silicon, this work is implemented in tantalum pentoxide (Ta<sub&g...

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Bibliographic Details
Main Authors: Mingjian You, Zhenyu Liu, Weiren Cheng, Xingyu Tang, Ning Ding, Zhengqi Li, Min Wang, Li Shen, Qiancheng Zhao
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Photonics Journal
Subjects:
Tantalum pentoxide
optical filters
Mach-Zehnder interferometer
athermalization
Online Access:https://ieeexplore.ieee.org/document/10854680/
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