Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design

Abstract Due to traits of CMOS compatibility and scalability, HfO2-based ferroelectric ultrathin films are promising candidates for next-generation low-power memory devices. However, their commercialization has been hindered by reliability issues, with fatigue failure being a major impediment. Here,...

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Main Authors: Chao Zhou, Yanpeng Feng, Liyang Ma, Haoliang Huang, Yangyang Si, Hailin Wang, Sizhe Huang, Jingxuan Li, Chang-Yang Kuo, Sujit Das, Yunlong Tang, Shi Liu, Zuhuang Chen
Format: Article
Language:English
Published: Nature Portfolio 2025-08-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-63048-3
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author Chao Zhou
Yanpeng Feng
Liyang Ma
Haoliang Huang
Yangyang Si
Hailin Wang
Sizhe Huang
Jingxuan Li
Chang-Yang Kuo
Sujit Das
Yunlong Tang
Shi Liu
Zuhuang Chen
author_facet Chao Zhou
Yanpeng Feng
Liyang Ma
Haoliang Huang
Yangyang Si
Hailin Wang
Sizhe Huang
Jingxuan Li
Chang-Yang Kuo
Sujit Das
Yunlong Tang
Shi Liu
Zuhuang Chen
author_sort Chao Zhou
collection DOAJ
description Abstract Due to traits of CMOS compatibility and scalability, HfO2-based ferroelectric ultrathin films are promising candidates for next-generation low-power memory devices. However, their commercialization has been hindered by reliability issues, with fatigue failure being a major impediment. Here, we report superior ferroelectric performances with fatigue-free behavior in interface-designed Hf0.5Zr0.5O2-based ultrathin heterostructures. A coherent CeO2-x /Hf0.5Zr0.5O2 heterointerface is constructed, wherein the oxygen-active, multivalent CeO2-x acts as an “oxygen sponge”, capable of reversibly accepting and releasing oxygen ions. This design effectively alleviates defect aggregation at the electrode-ferroelectric interface and reduces coercive field, enabling improved switching characteristics and exceptional reliability. Further, a symmetric capacitor architecture is designed to minimize the imprint, thereby suppressing the oriented oxygen defect drift. The two-pronged technique prevents intense fluctuations of oxygen concentration within the device during electrical cycling, suppressing the formation of paraelectric phase and polarization degradation. The interfacial design technique ensures superior switching and cycling performances of Hf0.5Zr0.5O2 capacitors, embodying a fatigue-free feature exceeding 1011 switching cycles and an endurance lifetime surpassing 1012 cycles, along with excellent temperature stability and long retention. These findings pave the way for the development of high-performance and ultra-stable hafnia-based ferroelectric devices.
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publishDate 2025-08-01
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spelling doaj-art-e2b7698790b84a5b80a1a9a8db9c4de32025-08-20T03:46:15ZengNature PortfolioNature Communications2041-17232025-08-011611910.1038/s41467-025-63048-3Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial designChao Zhou0Yanpeng Feng1Liyang Ma2Haoliang Huang3Yangyang Si4Hailin Wang5Sizhe Huang6Jingxuan Li7Chang-Yang Kuo8Sujit Das9Yunlong Tang10Shi Liu11Zuhuang Chen12State Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of SciencesDepartment of Physics, School of Science, Westlake UniversityQuantum Science Center of Guangdong-Hong Kong-Macao Greater Bay AreaState Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyState Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyState Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyState Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyDepartment of Electrophysics, National Yang Ming Chiao Tung UniversityMaterials Research Centre, Indian Institute of ScienceShenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of SciencesDepartment of Physics, School of Science, Westlake UniversityState Key Laboratory of Precision Welding and Joining of Materials and Structures, School of Materials Science and Engineering, Harbin Institute of TechnologyAbstract Due to traits of CMOS compatibility and scalability, HfO2-based ferroelectric ultrathin films are promising candidates for next-generation low-power memory devices. However, their commercialization has been hindered by reliability issues, with fatigue failure being a major impediment. Here, we report superior ferroelectric performances with fatigue-free behavior in interface-designed Hf0.5Zr0.5O2-based ultrathin heterostructures. A coherent CeO2-x /Hf0.5Zr0.5O2 heterointerface is constructed, wherein the oxygen-active, multivalent CeO2-x acts as an “oxygen sponge”, capable of reversibly accepting and releasing oxygen ions. This design effectively alleviates defect aggregation at the electrode-ferroelectric interface and reduces coercive field, enabling improved switching characteristics and exceptional reliability. Further, a symmetric capacitor architecture is designed to minimize the imprint, thereby suppressing the oriented oxygen defect drift. The two-pronged technique prevents intense fluctuations of oxygen concentration within the device during electrical cycling, suppressing the formation of paraelectric phase and polarization degradation. The interfacial design technique ensures superior switching and cycling performances of Hf0.5Zr0.5O2 capacitors, embodying a fatigue-free feature exceeding 1011 switching cycles and an endurance lifetime surpassing 1012 cycles, along with excellent temperature stability and long retention. These findings pave the way for the development of high-performance and ultra-stable hafnia-based ferroelectric devices.https://doi.org/10.1038/s41467-025-63048-3
spellingShingle Chao Zhou
Yanpeng Feng
Liyang Ma
Haoliang Huang
Yangyang Si
Hailin Wang
Sizhe Huang
Jingxuan Li
Chang-Yang Kuo
Sujit Das
Yunlong Tang
Shi Liu
Zuhuang Chen
Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
Nature Communications
title Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
title_full Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
title_fullStr Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
title_full_unstemmed Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
title_short Fatigue-free ferroelectricity in Hf0.5Zr0.5O2 ultrathin films via interfacial design
title_sort fatigue free ferroelectricity in hf0 5zr0 5o2 ultrathin films via interfacial design
url https://doi.org/10.1038/s41467-025-63048-3
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