Composition Determination from Strain Relaxation in 4D-STEM

Composition Determination from Strain Relaxation in 4D-STEM

Composition determination with high spatial resolution is crucial for device engineering of electronic and optoelectronic systems. While scanning transmission electron microscopy (STEM) can infer material composition from strain with high precision, multiple scattering effects (dynamic diffraction)...

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Bibliographic Details
Main Authors:	F. Otto, L. Niermann, T. Niermann, M. Lehmann
Format:	Article
Language:	English
Published:	IOP Publishing 2025-01-01
Series:	Applied Physics Express
Subjects:	Composition Determination 4D-STEM Heterointerfaces Dynamic Diffraction Strain Transmission Electron Microscopy
Online Access:	https://doi.org/10.35848/1882-0786/ade41b
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