Research on NiCr/NiSi thin film thermocouple sensor for measuring the surface temperature of automobile engine
This study describes a method for preparing thermocouple sensor based on NiCr/NiSi thin films. Using magnetron sputtering technology, the sensor structure includes a substrate, a SiO2 transition layer, a NiCr/NiSi thermocouple and a SiO2 protective layer.Experiments show that the sensor has a stable...
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| Format: | Article |
| Language: | English |
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Frontiers Media S.A.
2025-03-01
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| Series: | Frontiers in Materials |
| Subjects: | |
| Online Access: | https://www.frontiersin.org/articles/10.3389/fmats.2025.1554564/full |
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