Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings
The necessary information on the formation of high manganese silicide (Mn4Si7) coating by magnetron sputtering method is presented in this work. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are presented. Targets were created by adding silicon an...
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| Format: | Article |
| Language: | English |
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Elsevier
2024-12-01
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| Series: | Optical Materials: X |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590147824000652 |
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| author | B.D. Igamov G.T. Imanova V.V. Loboda V.V. Zhurikhina I.R. Bekpulatov A.I. Kamardin |
| author_facet | B.D. Igamov G.T. Imanova V.V. Loboda V.V. Zhurikhina I.R. Bekpulatov A.I. Kamardin |
| author_sort | B.D. Igamov |
| collection | DOAJ |
| description | The necessary information on the formation of high manganese silicide (Mn4Si7) coating by magnetron sputtering method is presented in this work. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are presented. Targets were created by adding silicon and manganese powders in the required amount and heating them under vacuum conditions at high temperature and pressure. Thin silicide films (thin coatings) of different thicknesses were formed on the surface of silicon dioxide from the produced targets using the method of magnetron sputtering. The electrophysical and thermoelectric properties of the produced films were studied using physical and optical methods.Due to the change in the structure of the coatings during subsequent heat treatment, the Seebeck coefficient noticeably increases. |
| format | Article |
| id | doaj-art-dd26c5cce4f7487aa80e35b571eb4d93 |
| institution | Kabale University |
| issn | 2590-1478 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Optical Materials: X |
| spelling | doaj-art-dd26c5cce4f7487aa80e35b571eb4d932024-12-13T11:01:01ZengElsevierOptical Materials: X2590-14782024-12-0124100353Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatingsB.D. Igamov0G.T. Imanova1V.V. Loboda2V.V. Zhurikhina3I.R. Bekpulatov4A.I. Kamardin5Scientific and Technical Center with a Design Bureau and Pilot Production of the Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanInstitute of Radiation Problems, Ministry of Science and Education Republic of Azerbaijan, 9 B.Vahabzade str., AZ1143, Baku, Azerbaijan; Khazar University, Department of Physics and Electronics, 41 Mahsati Str., AZ1096, Baku, Azerbaijan; Western Caspian University, Baku, AZ-1001, Azerbaijan; UNEC Research Center for Sustainable Development and Creen Economy Named After Nizami Ganjavi, Azerbaijan State University of Economics (UNEC), 6 Istiglaliyyat Str., Baku, 1001, Azerbaijan; Corresponding author. Institute of Radiation Problems, Ministry of Science and Education Republic of Azerbaijan, 9 B.Vahabzade str., AZ1143, Baku, Azerbaijan.Peter the Great St. Petersburg Polytechnic University, St. Petersburg, RussiaPeter the Great St. Petersburg Polytechnic University, St. Petersburg, RussiaKarshi State University, Karshi, UzbekistanScientific and Technical Center with a Design Bureau and Pilot Production of the Academy of Sciences of the Republic of Uzbekistan, Tashkent, UzbekistanThe necessary information on the formation of high manganese silicide (Mn4Si7) coating by magnetron sputtering method is presented in this work. The technology and basic modes of creating the necessary targets for a magnetron sputtering device are presented. Targets were created by adding silicon and manganese powders in the required amount and heating them under vacuum conditions at high temperature and pressure. Thin silicide films (thin coatings) of different thicknesses were formed on the surface of silicon dioxide from the produced targets using the method of magnetron sputtering. The electrophysical and thermoelectric properties of the produced films were studied using physical and optical methods.Due to the change in the structure of the coatings during subsequent heat treatment, the Seebeck coefficient noticeably increases.http://www.sciencedirect.com/science/article/pii/S2590147824000652Thin coatingHall constantElectrical conductivityNanostructureVolume concentrationResistivity |
| spellingShingle | B.D. Igamov G.T. Imanova V.V. Loboda V.V. Zhurikhina I.R. Bekpulatov A.I. Kamardin Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings Optical Materials: X Thin coating Hall constant Electrical conductivity Nanostructure Volume concentration Resistivity |
| title | Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings |
| title_full | Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings |
| title_fullStr | Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings |
| title_full_unstemmed | Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings |
| title_short | Electrophysical and thermoelectric properties and crystal structure of the formed Mn4Si7 thin vacuum coatings |
| title_sort | electrophysical and thermoelectric properties and crystal structure of the formed mn4si7 thin vacuum coatings |
| topic | Thin coating Hall constant Electrical conductivity Nanostructure Volume concentration Resistivity |
| url | http://www.sciencedirect.com/science/article/pii/S2590147824000652 |
| work_keys_str_mv | AT bdigamov electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings AT gtimanova electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings AT vvloboda electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings AT vvzhurikhina electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings AT irbekpulatov electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings AT aikamardin electrophysicalandthermoelectricpropertiesandcrystalstructureoftheformedmn4si7thinvacuumcoatings |