A low switching loss GaN trench MOSFET design utilizing a triple-shield structure

Abstract An innovative GaN trench MOSFET featuring an ultra-low gate-drain charge (Q gd ) is proposed, with its operational mechanisms thoroughly investigated using TCAD simulations. This novel MOSFET design introduces a triple-shield structure (BPSG-MOS) comprising three critical components: (1) a...

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Main Authors: Yihang Qiu, Li Wei
Format: Article
Language:English
Published: Nature Portfolio 2025-01-01
Series:Scientific Reports
Subjects:
Online Access:https://doi.org/10.1038/s41598-024-84007-w
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author Yihang Qiu
Li Wei
author_facet Yihang Qiu
Li Wei
author_sort Yihang Qiu
collection DOAJ
description Abstract An innovative GaN trench MOSFET featuring an ultra-low gate-drain charge (Q gd ) is proposed, with its operational mechanisms thoroughly investigated using TCAD simulations. This novel MOSFET design introduces a triple-shield structure (BPSG-MOS) comprising three critical components: (1) a grounded split gate (SG), (2) a P+ shield region (PSR), and (3) a semi-wrapped BP layer that extends the P-shield beneath the gate and along the sidewalls of the trench gate. Both the SG and PSR effectively reduce gate-drain coupling, transforming most of the gate-drain capacitance (C gd ) into a series combination of gate-source capacitance (C gs ) and drain-source capacitance (C ds ). Furthermore, the BP layer refines the gate-drain capacitance by converting the C gd at the trench gate sidewalls into C gs . This configuration significantly lowers C gd , resulting in an ultra-low Q gd . Compared to the dual-shield MOSFET (PSGT-MOS) and the conventional trench MOSFET (TG-MOS), the BPSG-MOS achieves reductions in C gd by 81% and 98%, respectively.
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spelling doaj-art-da9aa0c1ec1744d28f75c47dc28339852025-01-05T12:16:38ZengNature PortfolioScientific Reports2045-23222025-01-0115111110.1038/s41598-024-84007-wA low switching loss GaN trench MOSFET design utilizing a triple-shield structureYihang Qiu0Li Wei1College of Information and Control Engineering, Jilin Institute of Chemical TechnologyCollege of Physics and Electronic Information, Baicheng Normal UniversityAbstract An innovative GaN trench MOSFET featuring an ultra-low gate-drain charge (Q gd ) is proposed, with its operational mechanisms thoroughly investigated using TCAD simulations. This novel MOSFET design introduces a triple-shield structure (BPSG-MOS) comprising three critical components: (1) a grounded split gate (SG), (2) a P+ shield region (PSR), and (3) a semi-wrapped BP layer that extends the P-shield beneath the gate and along the sidewalls of the trench gate. Both the SG and PSR effectively reduce gate-drain coupling, transforming most of the gate-drain capacitance (C gd ) into a series combination of gate-source capacitance (C gs ) and drain-source capacitance (C ds ). Furthermore, the BP layer refines the gate-drain capacitance by converting the C gd at the trench gate sidewalls into C gs . This configuration significantly lowers C gd , resulting in an ultra-low Q gd . Compared to the dual-shield MOSFET (PSGT-MOS) and the conventional trench MOSFET (TG-MOS), the BPSG-MOS achieves reductions in C gd by 81% and 98%, respectively.https://doi.org/10.1038/s41598-024-84007-wGaN trench MOSFETSGPSRSemi-wrappedCgdQgd
spellingShingle Yihang Qiu
Li Wei
A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
Scientific Reports
GaN trench MOSFET
SG
PSR
Semi-wrapped
Cgd
Qgd
title A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
title_full A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
title_fullStr A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
title_full_unstemmed A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
title_short A low switching loss GaN trench MOSFET design utilizing a triple-shield structure
title_sort low switching loss gan trench mosfet design utilizing a triple shield structure
topic GaN trench MOSFET
SG
PSR
Semi-wrapped
Cgd
Qgd
url https://doi.org/10.1038/s41598-024-84007-w
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AT liwei alowswitchinglossgantrenchmosfetdesignutilizingatripleshieldstructure
AT yihangqiu lowswitchinglossgantrenchmosfetdesignutilizingatripleshieldstructure
AT liwei lowswitchinglossgantrenchmosfetdesignutilizingatripleshieldstructure