Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams
We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is appli...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2014/807489 |
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