Effect of Ar/CH4 Mixture Ratio on Properties of Ag/C:H Nanocomposite Prepared by DC Sputtering
Ag/C:H films were deposited by DC sputtering method on Si substrates with different Ar/CH4 gas mixture ratios. Effect of Ar/CH4 gas mixture ratios was investigated on optical and structural properties of Ag/C:H films by FTIR spectroscopy analysis, X-Ray diffractometry (XRD), scanning electron micros...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2013-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2013/142450 |
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