Research on high-precision large-aperture laser differential confocal-interferometric optical element multi-parameter measurement method

To fulfill the requirements of high-precision common baseline measurement for multiple parameters, such as surface profiling and the curvature radius of large-aperture optical elements on the same instrument, this paper proposes a research on a high-precision large-aperture laser differential confoc...

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Bibliographic Details
Main Authors: Weiqian Zhao, Liang Tang, Shuai Yang, Lirong Qiu
Format: Article
Language:English
Published: Light Publishing Group 2025-01-01
Series:Light: Advanced Manufacturing
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Online Access:https://www.light-am.com/article/doi/10.37188/lam.2024.047
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