Structural Properties and Elemental Composition of Au+ Implanted ZnO Films, Obtained by Sol-gel Method
The undoped and doped aluminum ZnO films were obtained by sol-gel method onto glass substrates with further implantation of Au+ ions. RBS, XRD methods and Raman spectroscopy were used for films characterization. The XRD analysis showed that obtained samples have a hexagonal structure with lattice co...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2014-06-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02003.pdf |
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