STRUCTURE OPTIMIZATION OF MICROBRIDGE BASED ON MEMS ULTRASONIC TRANSDUCER
Aimed at the low frequency of traditional ultrasonic transducers in low frequency domain,a new theoretical model of microbridge was designed,with analysis and research of the mechanical behavior. Solid modeling,modal analysis and electrostatic analysis were carried out with COMSOL 5. 4 for the silic...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Strength
2021-01-01
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| Series: | Jixie qiangdu |
| Subjects: | |
| Online Access: | http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2021.02.034 |
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