Fabrication of high-quality microlens arrays on fused silica based on combined rapid evaporative ablation and precision melting polishing of CO2 lasers

Fabrication of high-quality microlens arrays on fused silica based on combined rapid evaporative ablation and precision melting polishing of CO2 lasers

Microlens arrays (MLAs) made from fused silica possess broad applications in wavefront sensing, optical focusing, beam shaping, etc. However, it is challenging to fabricate the hard-brittle silica MLAs with high accuracy and low cost by conventional manufacturing techniques efficiently. In this work...

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Bibliographic Details
Main Authors: Zixiao Zhang, Hongqin Lei, Jian Cheng, Qiang Zhao, Xinxin He, Linjie Zhao, Mingjun Chen, Jinghe Wang
Format: Article
Language:English
Published: Elsevier 2024-11-01
Series:Journal of Materials Research and Technology
Subjects:
Fused silica
CO2 laser machining
Microlens arrays
Rapid ablation
Precision polishing
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785424023536
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