Fabrication of high-quality microlens arrays on fused silica based on combined rapid evaporative ablation and precision melting polishing of CO2 lasers
Microlens arrays (MLAs) made from fused silica possess broad applications in wavefront sensing, optical focusing, beam shaping, etc. However, it is challenging to fabricate the hard-brittle silica MLAs with high accuracy and low cost by conventional manufacturing techniques efficiently. In this work...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-11-01
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| Series: | Journal of Materials Research and Technology |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2238785424023536 |
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