Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layers

Pop the bubbles and let the current flow: mechanochemistry of micron and nano-sized openings in dielectric layers

Abstract Thin or ultra-thin dielectric layers have been widely used in various applications such as capacitors, piezo-electrics, and solar cells. This study explains the mechanism and chemistry of creating nano- and micron-sized openings in atomic-layer-deposited aluminum oxide-based dielectric laye...

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Bibliographic Details
Main Authors: Gizem Birant, Christian Rossi, Jan Czech, Wouter Marchal, Guy Brammertz, Tom Aernouts, Diego Colombara, Jessica de Wild, Bart Vermang
Format: Article
Language:English
Published: Nature Portfolio 2024-11-01
Series:Scientific Reports
Subjects:
Enthalpy of the alkali-halide metal salts
Thermochemistry
Aluminum oxide based dielectric layer
TD-GC-MS measurement
Dimethlydiselenide
Online Access:https://doi.org/10.1038/s41598-024-78919-w
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https://doi.org/10.1038/s41598-024-78919-w

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