Dry resist laser patterning of flexible neural probes with fluidic functionality
Optogenetics enables insights into the development of neural diseases. Custom-designed neural probes are necessary to access targeted brain regions. Multifunctional and mechanically flexible probes with minimal footprint, comprising fluidic channels for drug delivery, light sources for optical stimu...
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| Format: | Article |
| Language: | English |
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De Gruyter
2024-12-01
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| Series: | Current Directions in Biomedical Engineering |
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| Online Access: | https://doi.org/10.1515/cdbme-2024-2029 |
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| author | Bucherer Andreas Klein Eric Paul Oliver Ruther Patrick |
| author_facet | Bucherer Andreas Klein Eric Paul Oliver Ruther Patrick |
| author_sort | Bucherer Andreas |
| collection | DOAJ |
| description | Optogenetics enables insights into the development of neural diseases. Custom-designed neural probes are necessary to access targeted brain regions. Multifunctional and mechanically flexible probes with minimal footprint, comprising fluidic channels for drug delivery, light sources for optical stimulation, and micro electrodes for electro-physiological readout are beneficial due to reduced tissue trauma and consequently increased long-term stability. This study introduces a mechanically compliant neural probe that provides microfluidic channels and electrodes arranged close to fluidic outlet ports. The key challenge is to open the fluidic inlet and outlet ports avoiding potential channel clogging. A novel laserbased patterning process is demonstrated using a 248 nm KrF excimer laser. It offers high design flexibility in positioning the fluidic ports along the fluidic channels, as well their contamination-free opening under dry conditions. The laser patterning process applies reflective metal layers inside the fluidic channels, confining the laser ablation to the channel cover, thus minimizing potential damage of the channel substrate. Based on its high reflectivity and correspondingly low absorption and transmission at the applied laser wavelength, aluminium is determined to be the best choice for this protective layer. |
| format | Article |
| id | doaj-art-bc612f2f95124dc4a93ff99724a1a30c |
| institution | Kabale University |
| issn | 2364-5504 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Current Directions in Biomedical Engineering |
| spelling | doaj-art-bc612f2f95124dc4a93ff99724a1a30c2025-01-02T05:56:32ZengDe GruyterCurrent Directions in Biomedical Engineering2364-55042024-12-0110411912210.1515/cdbme-2024-2029Dry resist laser patterning of flexible neural probes with fluidic functionalityBucherer Andreas0Klein Eric1Paul Oliver2Ruther Patrick3Department of Microsystems Engineering (IMTEK), University of Freiburg, Georges-Kohler-Allee 103, 79110Freiburg, GermanyIMTEK and BrainLinks-BrainTools Center, University of Freiburg,Freiburg, GermanyIMTEK and BrainLinks-BrainTools Center, University of Freiburg,Freiburg, GermanyIMTEK and BrainLinks-BrainTools Center, University of Freiburg,Freiburg, GermanyOptogenetics enables insights into the development of neural diseases. Custom-designed neural probes are necessary to access targeted brain regions. Multifunctional and mechanically flexible probes with minimal footprint, comprising fluidic channels for drug delivery, light sources for optical stimulation, and micro electrodes for electro-physiological readout are beneficial due to reduced tissue trauma and consequently increased long-term stability. This study introduces a mechanically compliant neural probe that provides microfluidic channels and electrodes arranged close to fluidic outlet ports. The key challenge is to open the fluidic inlet and outlet ports avoiding potential channel clogging. A novel laserbased patterning process is demonstrated using a 248 nm KrF excimer laser. It offers high design flexibility in positioning the fluidic ports along the fluidic channels, as well their contamination-free opening under dry conditions. The laser patterning process applies reflective metal layers inside the fluidic channels, confining the laser ablation to the channel cover, thus minimizing potential damage of the channel substrate. Based on its high reflectivity and correspondingly low absorption and transmission at the applied laser wavelength, aluminium is determined to be the best choice for this protective layer.https://doi.org/10.1515/cdbme-2024-2029optogeneticsfluidic probelaser patterningdry resist |
| spellingShingle | Bucherer Andreas Klein Eric Paul Oliver Ruther Patrick Dry resist laser patterning of flexible neural probes with fluidic functionality Current Directions in Biomedical Engineering optogenetics fluidic probe laser patterning dry resist |
| title | Dry resist laser patterning of flexible neural probes with fluidic functionality |
| title_full | Dry resist laser patterning of flexible neural probes with fluidic functionality |
| title_fullStr | Dry resist laser patterning of flexible neural probes with fluidic functionality |
| title_full_unstemmed | Dry resist laser patterning of flexible neural probes with fluidic functionality |
| title_short | Dry resist laser patterning of flexible neural probes with fluidic functionality |
| title_sort | dry resist laser patterning of flexible neural probes with fluidic functionality |
| topic | optogenetics fluidic probe laser patterning dry resist |
| url | https://doi.org/10.1515/cdbme-2024-2029 |
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