Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment
To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
|
| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/12/3/258 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1849342638546747392 |
|---|---|
| author | Ke Li Yongjie Wang Gaochao Li Zhen Xu Yuanyuan Liu Ancun Shi Xiaoyan Yu Fang Li |
| author_facet | Ke Li Yongjie Wang Gaochao Li Zhen Xu Yuanyuan Liu Ancun Shi Xiaoyan Yu Fang Li |
| author_sort | Ke Li |
| collection | DOAJ |
| description | To meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently demodulate the composite spectra of multiple FP (Fabry–Pérot) cavities, enabling the simultaneous measurement of pressure and temperature parameters. The sensor was fabricated by etching on an SOI (silicon on insulator) and bonding with glass to form pressure-sensitive FP cavities, with the glass itself serving as the temperature-sensitive component as well as providing temperature compensation for pressure sensing. Experimental results showed that within the pressure range of 0–100 MPa, the sensor exhibited a sensitivity of 0.566 nm/MPa, with a full-scale error of 0.34%, and a linear fitting coefficient (R<sup>2</sup>) greater than 0.9999. Within the temperature range of 0–160 °C, the temperature sensitivity of the glass cavity is 0.0139 nm/°C and R<sup>2</sup> greater than 0.999. |
| format | Article |
| id | doaj-art-b2bc1f9d3677472bac6b788e3b30f15d |
| institution | Kabale University |
| issn | 2304-6732 |
| language | English |
| publishDate | 2025-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Photonics |
| spelling | doaj-art-b2bc1f9d3677472bac6b788e3b30f15d2025-08-20T03:43:20ZengMDPI AGPhotonics2304-67322025-03-0112325810.3390/photonics12030258Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure EnvironmentKe Li0Yongjie Wang1Gaochao Li2Zhen Xu3Yuanyuan Liu4Ancun Shi5Xiaoyan Yu6Fang Li7State Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaState Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaState Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaState Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaCenter of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, ChinaState Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaTechnology Innovation Center for Marine Metrology and Instruments Test, Ministry of Natural Resource, National Center of Ocean Standards and Metrology, Tianjin 300112, ChinaState Key Laboratory of Transducer Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, ChinaTo meet the pressure measurement requirements of deep earth exploration, we propose an OFPS (optical fiber pressure sensor) with self-temperature compensation based on MEMS technology. A spectral extraction and filtering algorithm, based on FFT (fast Fourier transform), was designed to independently demodulate the composite spectra of multiple FP (Fabry–Pérot) cavities, enabling the simultaneous measurement of pressure and temperature parameters. The sensor was fabricated by etching on an SOI (silicon on insulator) and bonding with glass to form pressure-sensitive FP cavities, with the glass itself serving as the temperature-sensitive component as well as providing temperature compensation for pressure sensing. Experimental results showed that within the pressure range of 0–100 MPa, the sensor exhibited a sensitivity of 0.566 nm/MPa, with a full-scale error of 0.34%, and a linear fitting coefficient (R<sup>2</sup>) greater than 0.9999. Within the temperature range of 0–160 °C, the temperature sensitivity of the glass cavity is 0.0139 nm/°C and R<sup>2</sup> greater than 0.999.https://www.mdpi.com/2304-6732/12/3/258MEMSFabry–Pérotoptical fiber sensorshigh-pressure sensingtemperature compensation |
| spellingShingle | Ke Li Yongjie Wang Gaochao Li Zhen Xu Yuanyuan Liu Ancun Shi Xiaoyan Yu Fang Li Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment Photonics MEMS Fabry–Pérot optical fiber sensors high-pressure sensing temperature compensation |
| title | Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment |
| title_full | Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment |
| title_fullStr | Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment |
| title_full_unstemmed | Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment |
| title_short | Optical Fiber Pressure Sensor with Self-Temperature Compensation Structure Based on MEMS for High Temperature and High Pressure Environment |
| title_sort | optical fiber pressure sensor with self temperature compensation structure based on mems for high temperature and high pressure environment |
| topic | MEMS Fabry–Pérot optical fiber sensors high-pressure sensing temperature compensation |
| url | https://www.mdpi.com/2304-6732/12/3/258 |
| work_keys_str_mv | AT keli opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT yongjiewang opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT gaochaoli opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT zhenxu opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT yuanyuanliu opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT ancunshi opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT xiaoyanyu opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment AT fangli opticalfiberpressuresensorwithselftemperaturecompensationstructurebasedonmemsforhightemperatureandhighpressureenvironment |