High piezoelectric property with exceptional stability in self-poled ferroelectric films

Abstract Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remai...

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Main Authors: Lisha Liu, Jiaojiao Yi, Kun Xu, Zhen Liu, Mingmeng Tang, Le Dai, Xuan Gao, Yang Liu, Shuhao Wang, Zhang Zhang, Liang Shu, Jing-Feng Li, Shujun Zhang, Yaojin Wang
Format: Article
Language:English
Published: Nature Portfolio 2024-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-54707-y
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author Lisha Liu
Jiaojiao Yi
Kun Xu
Zhen Liu
Mingmeng Tang
Le Dai
Xuan Gao
Yang Liu
Shuhao Wang
Zhang Zhang
Liang Shu
Jing-Feng Li
Shujun Zhang
Yaojin Wang
author_facet Lisha Liu
Jiaojiao Yi
Kun Xu
Zhen Liu
Mingmeng Tang
Le Dai
Xuan Gao
Yang Liu
Shuhao Wang
Zhang Zhang
Liang Shu
Jing-Feng Li
Shujun Zhang
Yaojin Wang
author_sort Lisha Liu
collection DOAJ
description Abstract Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remains a significant challenge. Here, we reveal the prerequisites for self-poling and leverage these insights to achieve unprecedented macroscopic performance through a two-step approach involving texture construction and hierarchical heterogeneity engineering. The significant [001] texture and fine Zr/Ti heterogeneity, facilitated by a PbO-TiO2 buffer, enable a piezoelectric charge coefficient of 550 pC/N in self-poled Pb(Zr0.52Ti0.48)O3 film. This material demonstrates impressive resilience to elevated temperatures up to 300 °C, experiencing less than a 16% degradation in performance. Our approach can be extended to other ferroelectric systems, offering an innovative solution for high-temperature packaging and harsh environments in practical electro-mechanical applications.
format Article
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institution Kabale University
issn 2041-1723
language English
publishDate 2024-12-01
publisher Nature Portfolio
record_format Article
series Nature Communications
spelling doaj-art-adc81da844e2431fb65a0fc411102a432025-01-05T12:35:37ZengNature PortfolioNature Communications2041-17232024-12-0115111010.1038/s41467-024-54707-yHigh piezoelectric property with exceptional stability in self-poled ferroelectric filmsLisha Liu0Jiaojiao Yi1Kun Xu2Zhen Liu3Mingmeng Tang4Le Dai5Xuan Gao6Yang Liu7Shuhao Wang8Zhang Zhang9Liang Shu10Jing-Feng Li11Shujun Zhang12Yaojin Wang13School of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingLaboratory of Advanced Multicomponent Materials, School of Mechanical Engineering, Jiangsu University of TechnologyDepartment of Mechanical Engineering, Stanford UniversitySchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingState Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua UniversityState Key Laboratory of New Ceramics and Fine Processing, School of Materials Science and Engineering, Tsinghua UniversityInstitute of Superconducting and Electronic Materials, Faculty of Engineering and Information Sciences, University of WollongongSchool of Materials Science and Engineering, Nanjing University of Science and Technology, NanjingAbstract Ferroelectric films are highly sought-after in micro-electro-mechanical systems, particularly with the trend towards miniaturization. However, their tendency to depolarize and degradation in piezoelectric properties when exposed to packaging procedures at temperatures exceeding 260 °C remains a significant challenge. Here, we reveal the prerequisites for self-poling and leverage these insights to achieve unprecedented macroscopic performance through a two-step approach involving texture construction and hierarchical heterogeneity engineering. The significant [001] texture and fine Zr/Ti heterogeneity, facilitated by a PbO-TiO2 buffer, enable a piezoelectric charge coefficient of 550 pC/N in self-poled Pb(Zr0.52Ti0.48)O3 film. This material demonstrates impressive resilience to elevated temperatures up to 300 °C, experiencing less than a 16% degradation in performance. Our approach can be extended to other ferroelectric systems, offering an innovative solution for high-temperature packaging and harsh environments in practical electro-mechanical applications.https://doi.org/10.1038/s41467-024-54707-y
spellingShingle Lisha Liu
Jiaojiao Yi
Kun Xu
Zhen Liu
Mingmeng Tang
Le Dai
Xuan Gao
Yang Liu
Shuhao Wang
Zhang Zhang
Liang Shu
Jing-Feng Li
Shujun Zhang
Yaojin Wang
High piezoelectric property with exceptional stability in self-poled ferroelectric films
Nature Communications
title High piezoelectric property with exceptional stability in self-poled ferroelectric films
title_full High piezoelectric property with exceptional stability in self-poled ferroelectric films
title_fullStr High piezoelectric property with exceptional stability in self-poled ferroelectric films
title_full_unstemmed High piezoelectric property with exceptional stability in self-poled ferroelectric films
title_short High piezoelectric property with exceptional stability in self-poled ferroelectric films
title_sort high piezoelectric property with exceptional stability in self poled ferroelectric films
url https://doi.org/10.1038/s41467-024-54707-y
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