Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology

Short-wave infrared (SWIR) imaging has a wide range of applications in civil and military fields. Over the past two decades, significant efforts have been devoted to developing high-resolution, high-sensitivity, and cost-effective SWIR sensors covering the spectral range from 0.9 μm to 3 μm. These a...

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Main Authors: Junhao Du, Xuewei Zhao, Jiale Su, Ben Li, Xiangliang Duan, Tianyu Dong, Hongxiao Lin, Yuhui Ren, Yuanhao Miao, Henry H. Radamson
Format: Article
Language:English
Published: MDPI AG 2025-01-01
Series:Sensors
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Online Access:https://www.mdpi.com/1424-8220/25/1/263
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author Junhao Du
Xuewei Zhao
Jiale Su
Ben Li
Xiangliang Duan
Tianyu Dong
Hongxiao Lin
Yuhui Ren
Yuanhao Miao
Henry H. Radamson
author_facet Junhao Du
Xuewei Zhao
Jiale Su
Ben Li
Xiangliang Duan
Tianyu Dong
Hongxiao Lin
Yuhui Ren
Yuanhao Miao
Henry H. Radamson
author_sort Junhao Du
collection DOAJ
description Short-wave infrared (SWIR) imaging has a wide range of applications in civil and military fields. Over the past two decades, significant efforts have been devoted to developing high-resolution, high-sensitivity, and cost-effective SWIR sensors covering the spectral range from 0.9 μm to 3 μm. These advancements stimulate new prospects across a wide array of fields including life sciences, medical diagnostics, defense, surveillance, security, free-space optics (FSO), thermography, agriculture, food inspection, and LiDAR applications. In this review, we begin by introducing monolithic SWIR image sensors and hybrid SWIR image sensors and indicate that flip-chip bump bonding technology remains the predominant integration method for hybrid SWIR image sensors owing to its outstanding performance, adaptable integration with innovative epitaxial SWIR materials, long-term stability, and long-term reliability. Subsequently, we comprehensively summarize recent advancements in epitaxial thin-film SWIR sensors, encompassing FPAs and flip-chip bump bonding technology for epitaxial InGaAs and Ge (Sn) thin-film SWIR sensors. Finally, a summary and outlook regarding the development of InGaAs and Ge (Sn) SWIR sensors are provided and discussed. The ongoing evolution of epitaxial thin-film SWIR sensors with flip-chip bump bonding technology is poised to foster new applications in both academic and industry fields.
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spelling doaj-art-ab77129c1a1f40e3abef2ba5bd3a85572025-01-10T13:21:24ZengMDPI AGSensors1424-82202025-01-0125126310.3390/s25010263Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process TechnologyJunhao Du0Xuewei Zhao1Jiale Su2Ben Li3Xiangliang Duan4Tianyu Dong5Hongxiao Lin6Yuhui Ren7Yuanhao Miao8Henry H. Radamson9Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaResearch and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, ChinaShort-wave infrared (SWIR) imaging has a wide range of applications in civil and military fields. Over the past two decades, significant efforts have been devoted to developing high-resolution, high-sensitivity, and cost-effective SWIR sensors covering the spectral range from 0.9 μm to 3 μm. These advancements stimulate new prospects across a wide array of fields including life sciences, medical diagnostics, defense, surveillance, security, free-space optics (FSO), thermography, agriculture, food inspection, and LiDAR applications. In this review, we begin by introducing monolithic SWIR image sensors and hybrid SWIR image sensors and indicate that flip-chip bump bonding technology remains the predominant integration method for hybrid SWIR image sensors owing to its outstanding performance, adaptable integration with innovative epitaxial SWIR materials, long-term stability, and long-term reliability. Subsequently, we comprehensively summarize recent advancements in epitaxial thin-film SWIR sensors, encompassing FPAs and flip-chip bump bonding technology for epitaxial InGaAs and Ge (Sn) thin-film SWIR sensors. Finally, a summary and outlook regarding the development of InGaAs and Ge (Sn) SWIR sensors are provided and discussed. The ongoing evolution of epitaxial thin-film SWIR sensors with flip-chip bump bonding technology is poised to foster new applications in both academic and industry fields.https://www.mdpi.com/1424-8220/25/1/263GeInGaAsSWIRflip chipFPAs
spellingShingle Junhao Du
Xuewei Zhao
Jiale Su
Ben Li
Xiangliang Duan
Tianyu Dong
Hongxiao Lin
Yuhui Ren
Yuanhao Miao
Henry H. Radamson
Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
Sensors
Ge
InGaAs
SWIR
flip chip
FPAs
title Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
title_full Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
title_fullStr Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
title_full_unstemmed Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
title_short Review of Short-Wavelength Infrared Flip-Chip Bump Bonding Process Technology
title_sort review of short wavelength infrared flip chip bump bonding process technology
topic Ge
InGaAs
SWIR
flip chip
FPAs
url https://www.mdpi.com/1424-8220/25/1/263
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