5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications

5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications

Abstract Wireless local area network (WLAN) has gained widespread application as a convenient network access method, demanding higher network efficiency, stability, and responsiveness. High-performance filters are crucial components to meet these needs. Film bulk acoustic resonators (FBARs) are idea...

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Bibliographic Details
Main Authors: Tingting Yang, Chao Gao, Yaxin Wang, Binghui Lin, Yupeng Zheng, Yan Liu, Cheng Lei, Chengliang Sun, Yao Cai
Format: Article
Language:English
Published: Nature Publishing Group 2024-11-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00820-3
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