DESIGN OF ANTI-IMPАСТ MICRO-ACCELERATION SENSOR IMITATING SHRIMP CLAW

Aiming at the damage of a Iow-range micro-electro-mechanical system(MEMS) acceleration sensor under tens of thousands of <italic>g</italic><sub>n</sub> overload during the measurement of outer ballistic information of conventional weapons and ammunition, a kind of shrimp claw...

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Bibliographic Details
Main Authors: ZHANG Xu, ZHAO Rui, SHI YunBo, ZU KaiXuan, ZHANG JieYu, YAN XiaoPeng
Format: Article
Language:zho
Published: Editorial Office of Journal of Mechanical Strength 2024-04-01
Series:Jixie qiangdu
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Online Access:http://www.jxqd.net.cn/thesisDetails#10.16579/j.issn.1001.9669.2024.02.020
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Summary:Aiming at the damage of a Iow-range micro-electro-mechanical system(MEMS) acceleration sensor under tens of thousands of <italic>g</italic><sub>n</sub> overload during the measurement of outer ballistic information of conventional weapons and ammunition, a kind of shrimp claw anti-impact micro-acceleration sensor was proposed, which could realize the index requirements of anti-overload 30 000<italic>g</italic><sub>n</sub> and range 50<italic>g</italic><sub>n</sub>. The finite element simulation results show that the displacement of the sensor is 0. 99 μm and the sensitivity is 0.124 pF/<italic>g</italic><sub>n</sub> under 50<italic>g</italic><sub>n</sub> load. The maximum equivalent stress of the acceleration sensor under 30 000<italic>g</italic><sub>n</sub> overload is reduced from 1 022.5 MPa to 84.326 MPa, which effectively improved the reliability of the sensor.
ISSN:1001-9669