The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films
In this study a-C:H (hydrogenated amorphous carbon) thin films were deposited on the 7075 Al alloy without an interlayer using a DC CVD (direct current chemical vapor deposition) method with varied negative substrate bias in order to improve the hardness and Young´s modulus. The highest values of fi...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Military University of Technology, Warsaw
2018-03-01
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| Series: | Problemy Mechatroniki |
| Subjects: | |
| Online Access: | http://promechjournal.pl/gicid/01.3001.0011.7176 |
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