The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films
In this study a-C:H (hydrogenated amorphous carbon) thin films were deposited on the 7075 Al alloy without an interlayer using a DC CVD (direct current chemical vapor deposition) method with varied negative substrate bias in order to improve the hardness and Young´s modulus. The highest values of fi...
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| Format: | Article |
| Language: | English |
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Military University of Technology, Warsaw
2018-03-01
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| Series: | Problemy Mechatroniki |
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| Online Access: | http://promechjournal.pl/gicid/01.3001.0011.7176 |
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| author | Daniel KOTTFER Marián MARTON Łukasz KACZMAREK Mariana Kuffova |
| author_facet | Daniel KOTTFER Marián MARTON Łukasz KACZMAREK Mariana Kuffova |
| author_sort | Daniel KOTTFER |
| collection | DOAJ |
| description | In this study a-C:H (hydrogenated amorphous carbon) thin films were deposited on the 7075 Al alloy without an interlayer using a DC CVD (direct current chemical vapor deposition) method with varied negative substrate bias in order to improve the hardness and Young´s modulus. The highest values of films hardness and Young´s modulus were 25.6±3.5 GPa and 140.3±4.6 GPa, respectively. The measured results show a promising potential of the a-C:H coated 7075 Al alloy for low load (up to 10 N) applications. |
| format | Article |
| id | doaj-art-a7b183762bdc4b4b831bff73734587a3 |
| institution | Kabale University |
| issn | 2081-5891 |
| language | English |
| publishDate | 2018-03-01 |
| publisher | Military University of Technology, Warsaw |
| record_format | Article |
| series | Problemy Mechatroniki |
| spelling | doaj-art-a7b183762bdc4b4b831bff73734587a32024-12-02T05:11:20ZengMilitary University of Technology, WarsawProblemy Mechatroniki2081-58912018-03-0191233010.5604/01.3001.0011.717601.3001.0011.7176The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin FilmsDaniel KOTTFER0Marián MARTON1Łukasz KACZMAREK2Mariana Kuffova3Technical University, Kosice, Slovak Republic, Faculty of Mechanical EngineeringSlovak University of Technology, Bratislava, Slovak Republic, Faculty of Electrical Engineering and Information TechnologyTechnical University of Lodz, Poland Faculty of Mechanical EngineeringAcademy of Armed Forces of gen. M.R. Štefánik, Department of Mechanical Engineering, Liptovský Mikulás, SlovakiaIn this study a-C:H (hydrogenated amorphous carbon) thin films were deposited on the 7075 Al alloy without an interlayer using a DC CVD (direct current chemical vapor deposition) method with varied negative substrate bias in order to improve the hardness and Young´s modulus. The highest values of films hardness and Young´s modulus were 25.6±3.5 GPa and 140.3±4.6 GPa, respectively. The measured results show a promising potential of the a-C:H coated 7075 Al alloy for low load (up to 10 N) applications.http://promechjournal.pl/gicid/01.3001.0011.7176mechanicsa-C:H thin filmhardnessYoung´s modulus7075 Al alloy |
| spellingShingle | Daniel KOTTFER Marián MARTON Łukasz KACZMAREK Mariana Kuffova The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films Problemy Mechatroniki mechanics a-C:H thin film hardness Young´s modulus 7075 Al alloy |
| title | The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films |
| title_full | The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films |
| title_fullStr | The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films |
| title_full_unstemmed | The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films |
| title_short | The Influence of the Bias on Mechanical Properties of a-C:H CVD Thin Films |
| title_sort | influence of the bias on mechanical properties of a c h cvd thin films |
| topic | mechanics a-C:H thin film hardness Young´s modulus 7075 Al alloy |
| url | http://promechjournal.pl/gicid/01.3001.0011.7176 |
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