The influence of interstage channel on efficiency of molecular drag stage in hybrid turbomolecular pump

The influence of interstage channel on efficiency of molecular drag stage in hybrid turbomolecular pump

The interstage channel is one of the factors affecting the efficiency of the molecular drag stage in a hybrid turbomolecular pump (TMP). The influence of parameters of the channel on the pumping performance of the molecular drag stage is investigated. The offered approach allows calculating the pu...

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Bibliographic Details
Main Authors: J. A. Shostak, N. K. Nikulin, G. T. Tsakadze, P. A. Shostak, A. M. Shostak
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonomous Educational Institution of Higher Education 2021-10-01
Series:Омский научный вестник: Серия "Авиационно-ракетное и энергетическое машиностроение"
Subjects:
turbomolecular pump
molecular drag pump
channel conductivity
volumetric gas flow
moving walls channel
pumping speed
resistance
gas flow
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%D0%A2.5,%20%20%E2%84%96%203%20(%D0%90%D0%A0%D0%B8%D0%AD%D0%9C)/45-53%20%D0%A8%D0%BE%D1%81%D1%82%D0%B0%D0%BA%20%D0%AE.%20%D0%90.,%20%D0%9D%D0%B8%D0%BA%D1%83%D0%BB%D0%B8%D0%BD%20%D0%9D.%20%D0%9A.,%20%D0%A6%D0%B0%D0%BA%D0%B0%D0%B4%D0%B7%D0%B5%20%D0%93.%20%D0%A2.%20%D1%82.%D0%B4..pdf
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