A Positioning and Tracking Performance–Enhanced Composite Control Algorithm for the Macro–Micro Precision Stage
In the macro–micro composite motion process, the macro stage achieves rapid motion in a large workspace, while the micro stage realizes precise positioning within a small displacement. The large-stroke and high-speed motion of the macro stage is influenced by nonlinear friction, overshooting, and vi...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/13/11/433 |
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